Focused Ion Beam (FIB)

A Focused Ion Beam (FIB) instrument uses a finely focused ion beam to modify and image samples. FIB is chiefly used to create very precise cross sections of a sample for subsequent imaging via SEM, STEM or TEM or to perform circuit modification. Additionally FIB can be used to image a sample directly, detecting emitted electrons. The contrast mechanism for FIB is different than for SEM or S/TEM, so for some specific examples FIB can provide unique information. A dual beam FIB/SEM integrates these two techniques into one tool thus enabling sample prep and SEM imaging without handling the sample.

Sample Preparation

As a sample preparation tool, the FIB can accurately produce cross-sections of a sample that are impossible to create otherwise:

• FIB has revolutionized sample preparation for TEM samples, making it possible to identify sub-micron features and precisely prepare cross sections.
• FIB-prepared sections are used extensively in SEM microscopy, where the FIB preparation, SEM imaging, and elemental analysis can happen on the same multi-technique tool.
• FIB-prepared sections are also used in Auger Electron Spectroscopy to provide elemental identification of subsurface features quickly and precisely.
• It is an ideal tool for examining products with small, difficult-to-access features, such those found in the semiconductor industry and for sub-surface particle identification.
• It is a good option for products that are hard to cross section, such as a soft polymer that is challenging to polish.

Evans Analytical Group® (EAG) works with a wide range of materials and regularly assists companies with FIB sample preparations and analyses. No other lab can match EAG’s skill set, experience, and fleet of instruments. Plus, you can count on fast turnaround times, accurate data, and person-to-person service, ensuring you understand the information that you receive.

View Application Notes

Ideal Uses for FIB Analysis		Relevant Industries for FIB Analysis
SEM, STEM and TEM sample preparation High resolution cross-section images of small, hard-to-access sample features Probe pad formation On-chip circuit modification		Biomedical/biotechnology Data storage Optics Semiconductor Telecommunications
Strengths of FIB Analysis		Limitations of FIB Analysis
Best method to cross-section small targets Rapid, high-resolution imaging Good grain contrast imaging Versatile platform that supports many other tools		Vacuum compatibility typically required Imaging may spoil subsequent analyses Residual Ga on analytical face Ion beam damage may limit image resolution Cross-section area is small

Application Notes